Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System

Abstract This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures. Both the experimental and finite element simulation approaches are employed investigate influence of interval between adjacent indentations rotation angle probe on formed The non-contacting part indenter sample material height pile-up two competing factors determine depth relationship indentations. For one array indentations, nanostructures with good consistency periodicity can be after indentation becoming stable, variation results in large difference morphology at bottom indentation. In addition, for arrays, shape generated spacing greater than 1 μm. Finally, Raman tests also carried out based obtained micro/nanostructures Rhodamine molecule. arrays smaller lead better enhancement effect substrate, which has potential applications fields biological or chemical molecular detection.